离子辐照磁性精细调控系统Helium-S®

离子辐照磁性精细调控系统Helium-S®

法国Spin-Ion公司成立2017年,源自法国国家研究中心/巴黎-萨克雷大学的知名课题组,在磁性材料的离子束工艺方面有20年的经验,拥有4项专利和40多篇发表文章。Spin-Ion公司推出的产品——可用于多种磁性研究的离子辐照磁性精细调控系统Helium-S®采用创新的离子束技术,可以通过超紧凑和快速的氦离子束设备精确控制原子间的位移,使其能够在原子尺度上加工材料,并通过离子束工艺来调控薄膜和异质结构。目前全球已有20多家科研和工业用户以及合作伙伴使用该技术。2020Spin-Ion公司在国内安装了第一套Helium – S®系统,的技术正吸引来自相关科研圈和工业领域越来越多的关注。

可通过超紧凑和快速的氦离子束设备精确控制原子间的位移,通过氦离子辐照可精确调控磁性薄膜或晶圆的磁学性质。

应用领域:

- 磁性随机存储器(MRAM):自旋转移矩磁性随机存储(STT-MRAM),自旋轨道矩磁性随机存储(SOT-MRAM),磁畴壁磁性随机存储(DW-MRAM)等;

自旋电子学:斯格明子,磁性隧道结,磁传感器等;

磁学相关:磁性氧化物,多铁性材料;

其他:薄膜改性,芯片加工,仿神经器件,逻辑器件等。


产品特点:

- 可通过超紧凑和快速的氦离子束设备精确控制原子间的位移,通过氦离子辐照可精确调控磁性薄膜或晶圆的磁学性质。

- 可提供能量范围:1-30 keV的He+离子束

- 采用创新的电子回旋共振(ECR)离子源

- 可对25 mm的试样进行快速的均匀辐照(几分钟)

- 超紧凑的设计,节省实验空间

- 可与现有的超高真空设备互联


基本参数:

离子束种类

• 氦离子 (He+)

• 可能产生的离子 : 氢离子 (H+)

能量范围 

• 1-30 keV
• 分辨率<50 eV

典型离子通量

在10 μA时,1015 离子数 /平方厘米/分钟

电流范围

1-50 μA (按能量不同)

离子束滤波器

维恩滤波器

离子束扫描

• X-Y双轴位移

• 扫描区域: 25 mm x 25 mm

均匀性

• 强度:<+/- 1%
• 角度:<+/- 3°

离子束纯度

1/10000

真空度

最大10-7 mbar

尺寸

• 超紧凑设计
• 长度<1.5 m

软件

• 可实现离子束参数的全面控制

• PLC控制

辐照腔

可对25mm晶圆进行辐照

高温转角选件

可控制不同的辐照角度,可加热温度至500°C

快速进样室选件(Load lock)

和辐照腔集成,可过渡25 mm晶圆大小样品


调控界面各向异性性质和DMI

 

低电流诱发的SOT转换获取

 

控制斯格明子和磁畴壁的动态变化

• Helium Ions Put Magnetic Skyrmions on the Track, R.Juge & D.Ravelosona & O.Boulle, Nanoletters, 21, 7, 2989–2996, (2021)

• Ion irradiation and implantation modifications of magneto-ionically induced exchange bias in Gd/NiCoO, Christopher J. Jensen & Dafiné Ravelosona, Kai Liu, Journal of Magnetism and Magnetic Materials 540, 168479 (2021)

• Tailoring interfacial effect in multilayers with Dzyaloshinskii–Moriya interaction by helium ion irradiation, A.Sud & D.Ravelosona &M.Cubukcu, Scientific report 11, 23626 (2021)

• Magnetic field frustration of the metal-insulator transition in V2O3, J.Trastoy & D.Ravelosona & Y.Schuller, Physical Review B 101, 245109 (2020)

• Controlling magnetism by interface engineering, L Herrera Diez & D Ravelosona, Book Magnetic Nano- and Microwires 2nd Edition, Elsevier (2020)

• Reduced spin torque nano-oscillator linewidth using He+ irradiation, S Jiang & D Ravelosona & J  Akerman, Appl. Phys. Lett. 116, 072403 (2020)

• Spin–orbit torque driven multi-level switching in He+ irradiated W–CoFeB–MgO Hall bars with perpendicular anisotropy, X.Zhao & M.Klaui & W.Zhao & D.Ravelosona, Appl. Phys. Lett 116, 242401 (2020)

• Enhancement of the Dzyaloshinskii-Moriya Interaction and domain wall velocity through interface intermixing in Ta/CoFeB/MgO, L Herrera Diez & D Ravelosona, Physical Review B 99, 054431 (2019)

• Enhancing domain wall velocity through interface intermixing in W-CoFeB-MgO films with perpendicular anisotropy, X Zhao & W.Zhao & D Ravelosona, Applied Physics Letter 115, 122404 (2019)

• Suppression of all-optical switching in He+  irradiated Co/Pt multilayers: influence of the domain-wall energy, M El Hadri & S Mangin & D Ravelosona,  J. Phys. D: Appl. Phys. 51, 215004 (2018)

• Tuning the magnetodynamic properties of all-perpendicular spin valves using He+ irradiation, Sheng Jiang & D.Ravelosona & J.Akerman, AIP Advances 8, 065309 (2018)

• Controlling magnetic domain wall motion in the creep regime in He-irradiated CoFeB/MgO films with perpendicular anisotropy, L.Herrera Diez & D.Ravelosona, Applied Physics Letter 107, 032401 (2015)

• Measuring the Magnetic Moment Density in Patterned Ultrathin Ferromagnets with Submicrometer Resolution, T.Hingant & D.Ravelosona & V.Jacques, Physical Review Applied 4, 014003 (2015)

• Irradiation-induced tailoring of the magnetism of CoFeB/MgO ultrathin films, T Devolder & D Ravelosona, Journal of Applied Physics 113, 203912 (2013)

• Influence of ion irradiation on switching field and switching field distribution in arrays of Co/Pd-based bit pattern media, T Hauet & D Ravelosona, Applied Physics Letters 98, 172506 (2011)

• Ferromagnetic resonance study of Co/Pd/Co/Ni multilayers with perpendicular anisotropy irradiated with helium ions, J-M.Beaujour & A.D. Kent & D.Ravelosona &E.Fullerton, Journal of Applied Physics 109, 033917 (2011)

• Tailoring magnetism by light-ion irradiation, J Fassbender, D Ravelosona, Y Samson, Journal of Physics D: Applied Physics 37 (2004)

• Ordering intermetallic alloys by ion irradiation: A way to tailor magnetic media, H Bernas & D Ravelosona, Physical review letters 91, 077203 (2003)

Beihang University (China)

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University of California Davis (USA)

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University of Lorraine (France)

SPINTEC Grenoble (France)

University of Cambridge (UK)

University of Manchester (UK)

Nanyang Technological University

A*STAR (Singapore)

University of Gothenburg (Sweden)

Western Digital (USA)

IBM (USA)

Singulus Technologies (Germany)